Circular Membrane Deflection Calculator

Input Parameters:

Radius µm Material Type Thickness µm Residual Stress MPa Pressure MPa

Elastic Modulus GPa Poisson Value Density kg/m³

Output Parameters:

Tolerance % Small Def. Value µm Large Def. Value µm

W.P. Eaton, F. Bitsie, J.H. Smith, D.W. Plummer, "A New Analytical Solution for Diaphragm Deflection and its Application to a Surface-Micromachined Pressure Sensor",International Conference on Modeling and Simulation of Microsystems,MSM,1999.
S. Timoshenko, S.Woinosky-Krieger, Theory of Plates and Shells, McGraw Hill Classic Textbook Reissue,1987.