Circular Membrane Deflection Calculator
Input Parameters:
Radius
µm
Material Type
UNCD
NCD
Diamond
Silicon
Silicon Dioxide
Silicon Nitride
Custom
Thickness
µm
Residual Stress
MPa
Pressure
MPa
Elastic Modulus
GPa
Poisson Value
Density
kg/m
3
Plot Deflection
Output Parameters:
Tolerance
%
Small Def. Value
µm
Large Def. Value
µm
Graphing...
References
Calculator Code by
Serdar Görümlü
, PHP Convertion by
Çağlar Yeşilyurt
. © 2012. All Rights Reserved.
W.P. Eaton, F. Bitsie, J.H. Smith, D.W. Plummer, "A New Analytical Solution for Diaphragm Deflection and its Application to a Surface-Micromachined Pressure Sensor",International Conference on Modeling and Simulation of Microsystems,MSM,1999.
S. Timoshenko, S.Woinosky-Krieger, Theory of Plates and Shells, McGraw Hill Classic Textbook Reissue,1987.